Nanoelectromechanical systems face the future
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Source: nano.caltech.edu, Author: roukes
Page: 20 pages
What is an electromechanical system? Page 5. In general, the output of an
electromechanical device is the movement of the mechanical element.
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PhysicsWeb - Physics World Magazine
http://physicsweb.org/article/world/14/2/8
Features: February 2001
Back to Volume 14 Issue 2 Page Article 1 8 of 2 of 10
Nanoelectromechanical systems face the future
A host of novel applications and new physics could be unleashed as microelectromechanical systems shrink towards the nanoscale. In the late 1950s visionary physicist Richard Feynman issued a public challenge by offering $1000 to the first person to create an electrical motor "smaller than 1/64th of an inch". Much to Feynman's consternation the young man who met this challenge, William McLellan, did so by investing many tedious and painstaking hours building the device by hand using tweezers and a microscope (figure 1). Figure 1 McLellan's motor now sits in a display case at the California Institute of Technology and has long since ceased to spin. Meanwhile, in the field that Feynman hoped to incite, the wheels are turning - both figuratively and literally - in many university and corporate laboratories, and even on industrial production lines. Indeed, the field of microelectromechanical Figure 2 systems (MEMS), which became firmly established in the mid-1980s, has now matured to the point where we can be rather blasé about the mass production of diminutive motors that are hundreds of times smaller than McLellan's original. Along the way the MEMS community has developed some truly intriguing products - from digital projectors that contain millions of electrically driven micromirrors to microscale motion sensors that sit in cars ready to deploy airbags (figure 2). A whole new realm of interconnected microsensors and instruments is emerging from the minds and laboratories of the scientists and engineers engaged in this research. Their devices are being assigned to a myriad of remote outposts, from the depths of the sea and the Earth's crust, to the far-flung regions of space and distant planets. Moreover, the robustness and low cost of such remote microsensors are helping to provide an avalanche of information about our physical surroundings. MEMS represent the marriage of semiconductor processing to mechanical engineering - at a very small scale. And it is a field that has grown enormously during the past decade. Numerous companies - from the semiconductor giants to fledgling start-ups - are all now scrambling for a piece of the action at the microscale. Yet very little has been done with MEMS at sizes below one micrometre. This stands in striking contrast to the recent developments in mainstream microelectronics where
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